Sin-Hua Tseng

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This work presents a novel method of fabricating multi-probe electrode arrays on lightly doped single-crystal silicon. Such arrays are essential tools for electrical stimulation and recording of neural signals. The novel micro fabrication process, based on silicon-on-insulator (SOI) technology, inherently has good controllable probe thickness. The probe(More)
A multi-electrode array (MEA) with 16 channels was designed to record simultaneously the velocity of conduction of neurons in a measurement system for bio-medical applications. MEA were fabricated with MEMS technology on a silicon-on-insulator (SOI) wafer, which controls the thickness of the probe effectively. All used probes have length 3mm and width(More)
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