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Empirical mode decomposition is introduced into Fourier transform profilometry to extract the zero spectrum included in the deformed fringe pattern without the need for capturing two fringe patterns with pi phase difference. The fringe pattern is subsequently demodulated using a standard Fourier transform profilometry algorithm. With this method, the(More)
The phase unwrapping algorithm plays a very important role in many noncontact optical profilometries based on triangular measurement theory. Here we focus on discussing how to diminish the phase error caused by incorrect unwrapping path in wavelet transform profilometry. We employ the amplitude value map of wavelet transform coefficients at the(More)
We propose a universal calculation formula of Fourier transform profilometry and give a strict theoretical analysis about the phase-height mapping relation. As the request on the experimental setup of the universal calculation formula is unconfined, the projector and the camera can be located arbitrarily to get better fringe information, which makes the(More)
Social network analysis and visualization is an active area of study but good organizations of social network information are lacking. This paper proposes a domain ontology model focusing on social network information, which abstracts the impersonal existences in social network information domain into some primary ontologies. According to the requirements(More)
Wavelet ridge techniques utilizing daughter wavelets under two different kinds of definitions in the optical fringe pattern analysis are theoretically clarified. The clarification reveals that the phase of the optical fringe pattern is equal to that of its wavelet transform coefficients on the ridge using both of the two wavelet definitions. The differences(More)
An analytical approach to the impact of polarization aberration on lithographic imaging is proposed. The linear relationship between image placement error (IPE) of alternating phase-shifting mask (Alt-PSM) and odd aberration items of polarization aberrations, as well as that between best focus shift (BFS) of Alt-PSM and even aberration items of polarization(More)
A method based on a nonsubsampled contourlet transform, which is an overcomplete transform with multiresolution, directionality, and shift-invariance properties, is proposed to extract the fundamental frequency component of an optical fringe pattern in profilometry and interferometry. The nonsubsampled contourlet transform method overcomes the disadvantages(More)
A wavefront aberration measurement method for a hyper-NA lithographic projection lens by use of an aerial image based on principal component analysis is proposed. Aerial images of the hyper-NA lithographic projection lens are expressed accurately by using polarized light and a vector imaging model, as well as by considering the polarization properties. As a(More)
With the shrinking of the critical dimension, the impact of polarization aberration on lithographic imaging becomes increasingly prominent. In this paper, the linear relationships between the image placement error and odd Pauli-Zernike polarization aberrations, as well as those between the best focus shift and even Pauli-Zernike polarization aberrations,(More)