Shota Otsuka

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Stress migration (SM) behavior in narrow lines is investigated in detail using different kinds of test patterns. The characteristic of 0.14mum wide line SM failure is different from that of wider line SM failure. The failure rate in the minimum 0.14mum wide line is more than that in 0.2-0.42mum wide lines. The Weibull shape parameter "m" is about 5 in the(More)
SUMMARY High-performance and low-cost sensors are critical devices for high-throughput analyses of bio-samples in medical diagnoses and life sciences. In this paper, we demonstrate photonic crystal nanolaser sensor, which detects the adsorption of biomolecules from the lasing wavelength shift. It is a promising device, which balances a high sensitivity,(More)
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