Shojiro Komastu

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New sp-bonded polytypic forms of BN, namely, 6H-BN and 30H-BN were prepared by plasma-assisted chemical vapor deposition (CVD) with an excimer laser at 193 nm being irradiated on the growing film surface. Only the 6H-BN was formed by post-deposition laser irradiation (PDL) of sp-bonded BN precursor films prepared by plain plasma assisted CVD. The PDL(More)
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