Shivaprasad Karanth

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In the present paper, an uncooled 32x32 pixels microbolometer array has been developed by surface micromachining technology, A suitable readout electronics was designed for reading the individual pixel value, Then array together with the electronics was characterized in front of the blackbody radiation source and results were discussed.
Silicon oxynitride thin films are prepared by ion-beam sputtering, and the optical properties and surface chemical composition are studied by spectrophotometric and x-ray photoelectron spectroscopy, respectively. It is seen that the films sputtered by use of nitrogen alone as the sputtering species from a silicon nitride target are completely transparent (k(More)
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