Shingo Sumie

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SUMMARY Microwave photoconductivity decay (μ-PCD) method was applied to evaluate the effects of chemical composition and Ar + plasma induced damage on the bulk and the surface states in amorphous In-Ga-Zn-O (a-IGZO) films. It was found that the peak reflectivity signal in the pho-toconductivity response increased with decreasing the Ga content, and had a(More)
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