Shih-Haur Shen

  • Citations Per Year
Learn More
The modeling and multivariable control of the multi-zone chemical mechanical polishing (CMP) is studied in this work. For a three-zone CMP, the copper thickness across the radial position is measured with an in -situ sensor and then the m easurements are converted to 60 data points across the radial position. In the process control notation, these are the(More)
  • 1