Sheng-Shian Li

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A vibrating polysilicon micromechanical “hollow-disk” ring resonator obtained by removing quadrants of material from a solid disk resonator, but purposely leaving intact beams of material to non-intrusively support the structure, has been demonstrated in several vibration modes spanning frequencies from HF (24.4 MHz), to VHF (72.1 MHz), to UHF (1.169 GHz),(More)
A reduction in phase noise by 13 dB has been obtained over a previous 60-MHz surface-micromachined micromechanical resonator oscillator by replacing the single resonator normally used in such oscillators with a mechanically-coupled array of them to effectively raise the power handling ability of the frequency selective tank. Specifically, a(More)
A medium-scale integrated (MSI) vibrating micromechanical filter circuit that utilizes 128 radial-mode disk and mechanical link elements to achieve low motional resistance while suppressing unwanted modes and feedthrough signals has been demonstrated with a 0.06%-bandwidth insertion loss less than 2.5 dB at 163 MHz. The ability to attain an insertion loss(More)
Vibrating polysilicon micromechanical ring resonators, using a unique extensional wine-glass-mode shape to achieve lower impedance than previous UHF resonators, have been demonstrated at frequencies as high as 1.2 GHz with a Q of 3,700, and 1.52 GHz with a Q of 2,800. The 1.2-GHz resonator exhibits a measured motional resistance of 1 MOmega with a dc-bias(More)
Substantial increases by more than 22 dB in the third-order input intercept points (IIP3) of capacitively transduced MEMS-based vibrating micromechanical resonators have been attained by using contour-mode disk geometries to replace previous clamped-clamped beam versions. Specifically, a 156-MHz contour-mode disk resonator with Q = 20,500 exhibits a(More)
VHF and UHF MEMS-based vibrating micromechanical resonators equipped with new solid dielectric (i.e., filled) capacitive transducer gaps to replace previously used air gaps have been demonstrated at 160 MHz, with Q’s ~ 20,200 on par with those of air-gap resonators, and motional resistances (Rx’s) more than 8× smaller at similar frequencies and bias(More)