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A vibrating polysilicon micromechanical " hollow-disk " ring resonator obtained by removing quadrants of material from a solid disk resonator, but purposely leaving intact beams of material to non-intrusively support the structure, has been demonstrated in several vibration modes spanning Furthermore, the use of notched support attachments closer to actual(More)
Vibrating micromechanical resonators with solid dielectric capacitive-transducer 'gaps', " Abstract—VHF and UHF MEMS-based vibrating micro-mechanical resonators equipped with new solid dielectric (i.e., filled) capacitive transducer gaps to replace previously used air gaps have been demonstrated at 160 MHz, with Q's ~ 20,200 on par with those of air-gap(More)
Vibrating polysilicon micromechanical ring resonators, using a unique extensional wine-glass-mode shape to achieve lower impedance than previous UHF resonators, have been demonstrated at frequencies as high as 1.2 GHz with a Q of 3,700, and 1.52 GHz with a Q of 2,800. The 1.2-GHz resonator exhibits a measured motional resistance of 1 MOmega with a dc-bias(More)
2 2 2 4 p o x V A Q d KM R ε = 2 2 2 2 − = n q ζ , E R f o) 2 2 (2 σ ρ π ζ + = , σ ξ − = 1 2 , () [ ] () 2 n nq q n q n n n The quartz crystal used in the reference oscillator in a wireless communication transceiver is among the most difficult to integrate on chip. On-chip devices capable of matching its Q (on the order of 10,000) and temperature stability(More)
A reduction in phase noise by 13 dB has been obtained over a previous 60-MHz surface-micromachined microme-chanical resonator oscillator by replacing the single resonator normally used in such oscillators with a mechanically-coupled array of them to effectively raise the power handling ability of the frequency selective tank. Specifically, a(More)
An MSI micromechanical differential disk-array filter, " Dig. of Tech. Abstract: A medium-scale integrated (MSI) vibrating micromechanical filter circuit that utilizes 128 radial mode disk and mechanical link elements to achieve low motional resistance while suppressing un-wanted modes and feedthrough signals has been demonstrated with a 0.06%-bandwidth(More)
Third-order intermodulation distortion in capacitively-driven VHF micromechanical resona-tors, " Abstract—Substantial increases by more than 22 dB in the third-order input intercept points (IIP 3) of capacitively trans-duced MEMS-based vibrating micromechanical resonators have been attained by using contour-mode disk geometries to replace previous(More)
Disk-array design for suppression of unwanted modes in micromechanical composite-array filters, " Tech. ABSTRACT A disk composite-array structure has been demonstrated that places its constituent disks in a triangular pattern around a " mechanical output " disk, while coupling them with half-wavelength links, in order to accentuate a desired resonant mode(More)