Sharona Feldman

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A DC to RF shunt contact micro-electro-mechanical switch was fabricated. The fabrication of the MEMS device was preformed using a bulk micromachining process on an SOI wafer followed by a vertical integration to a microwave circuit wafer. The pull-in voltage and natural frequency of the switch were characterized. Also, RF performances at both switch states(More)
General background is given to describe the factors leading up to the implementation of a computerized hearing aid test system in a production environment. The digital measurement methods for determination of the required acoustal components such as fundamental, rms, distortion, etc., in the presence of noise are discussed. The use of the concept of the(More)
This paper will systematically compare the measured results of electrostatic torsion micromirrors with various design parameters, namely: the actuator shape, location of bottom electrode and aspect ratio of the suspending beam. The results of this study are instrumental for the design of torsion micromirrors with new efficient simulation methodology,(More)
A micro-electro-mechanical (MEMS) DC to RF shunt switch was fabricated using a bulk micromachining process for single crystal silicon. The switch was vertically integrated to a microwave circuit using flip-chip bonding technology. The pull-in voltage and switching time were measured. Also, RF characterization of switch states was performed. This new design(More)
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