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A wide range of microcomponents can today be produced using various microfab-rication techniques. The assembly of complex microsystems consisting of several single components (i.e. hybrid microsystems) is, however, a difficult task that is seen to be a real challenge for the robotic research community. It is necessary to conceive flexible, highly precise(More)
Current research work on the development of an automated nanohandling cell in a scanning electron microscope (SEM) is presented. An experimental setup is shown, in which two micro robots cooperate in the vacuum chamber of an SEM. A client-server control system that can integrate various microrobots and sensors has been developed and evaluated by automatic(More)
In the scanning electron microscope (SEM), specially designed microrobots can act as a flexible assembly facility for hybrid microsystems, as probing devices for in-situ tests on IC structures or just as a helpful teleoperated tool for the SEM operator when examining samples. Several flexible microrobots of this kind have been developed and tested. Driven(More)
This paper reports the remote handling of microscale objects, between two sites approximately 630 km distant. To manipulate objects less than 10 µm, specific equipments such as AFM (Atomic Force Microscope) cantilevers integrated into a SEM (Scanning Electron Microscope) are generally required. Enabling remote access to such a system would benefit(More)
Carbon nanotubes (CNTs) are one of the most promising materials for nanoelectronic applications. Before bringing CNTs into large-scale production, a reliable nanorobotic system for automated handling and characterization as well as prototyping of CNT-based components is essential. This paper presents the NanoLab setup, a nanorobotic system that combines(More)
The propulsion of nano-ferromagnetic objects by means of MRI gradients is a promising approach to enable new forms of therapy. In this work, necessary techniques are presented to make this approach work. This includes path planning algorithms working on MRI data, ferromagnetic artifact imaging and a tracking algorithm which delivers position feedback for(More)