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Current research work on the development of an automated nanohandling cell in a scanning electron microscope (SEM) is presented. An experimental setup is shown, in which two micro robots cooperate in the vacuum chamber of an SEM. A client-server control system that can integrate various micro-robots and sensors has been developed and evaluated by automatic(More)
A wide range of microcomponents can today be produced using various microfab-rication techniques. The assembly of complex microsystems consisting of several single components (i.e. hybrid microsystems) is, however, a difficult task that is seen to be a real challenge for the robotic research community. It is necessary to conceive flexible, highly precise(More)
In the scanning electron microscope (SEM), specially designed microrobots can act as a flexible assembly facility for hybrid microsystems, as probing devices for in-situ tests on IC structures or just as a helpful teleoperated tool for the SEM operator when examining samples. Several flexible microrobots of this kind have been developed and tested. Driven(More)
— This paper reports the remote handling of mi-croscale objects, between two sites approximately 630 km distant. To manipulate objects less than 10 µm, specific equipments such as AFM (Atomic Force Microscope) cantilevers integrated into a SEM (Scanning Electron Microscope) are generally required. Enabling remote access to such a system would benefit any(More)