Satoshi Kiyono

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This paper presents a newly developed displacement sensor system. Interferometers or linear encoders are normally used to monitor the motion of precision stages. However, these sensors operate in one dimension only. Hence, if the device has multiple degrees of freedom, the number of sensors required to monitor its motion must be the same as the number of(More)
This paper describes an intelligent nano-probe for precision nanofabrication of complex surfaces. The probe is a hybrid of a fast controlled diamond cutting unit (FTC-unit) and a highly-sensitive piezoelectric force sensor. The FTC-unit consists of a diamond cutting tool and a PZT actuator. Complex surfaces can be generated through fast controlling the(More)
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