Sanming Yi

  • Citations Per Year
Learn More
Metal-transparent-metallic-oxide (MTMO) grayscale photomasks fabricated by direct laser writing have been proposed in recent years. The fabrication mechanism is attributed to light-induced melt-oxidization. The temporal-spatial distribution of temperature fields of indium film-glass samples under a laser pulse have been calculated by the Finite-Difference(More)
Metal-transparent-metallic-oxide (MTMO) grayscale photomasks fabricated by laser-induced oxidization are studied based on three stages oxidation theories and absorbed laser power density distribution. The calculated fabrication diameter is consistent with the experimental fabrication size.
  • 1