Many production steps used in the manufacturing of integrated circuits involve the deposition of material from the gas phase onto wafers. Models for these processes should account for gaseousâ€¦ (More)

We construct a locally compact Hausdorff topology on the path space of a directed graph E and identify its boundary-path space âˆ‚E as the spectrum of a commutative Câˆ—-subalgebra DE of Câˆ—(E). We thenâ€¦ (More)

We construct a locally compact Hausdorff topology on the path space of a finitely aligned k -graph Î› . We identify the boundary-path space âˆ‚Î› as the spectrum of a commutative C âˆ— -subalgebra D Î› of Câ€¦ (More)

Starting with a substitution tiling, we demonstrate a method for constructing infinitely many new substitution tilings. Each of these new tilings is derived from a graph iterated function system andâ€¦ (More)

We present a Boltzmann equation-based model for transport and reaction in micrometer-scale features such as those found in integrated circuit fabrication. We focus on the adsorption and desorption ofâ€¦ (More)