The ability to make in-situ performance measurements of MEMS operating at high speeds has been demonstrated using a new image analysis system. Significant improvements in performance and reliability have directly resulted from the use of this system.
Introduction In the most general sense of the word, an engine is a device that converts heat or chemical energy into work. The most work that can be developed by a particular engine design is its reversible work. The irreversibility of an engine is the difference between the reversible work that it could develop and the actual work that it performs; it is… (More)