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This paper introduces a simple theoretical model for the response time of thermal flow sensors. Response time is defined here as the time needed by the sensor output signal to reach 63.2% of amplitude due to a change of fluid flow. This model uses the finite-difference method to solve the heat transfer equations, taking into consideration the transient… (More)

Miniaturized thermal flow sensors have opened the doors for a large variety of new applications due to their small size, high sensitivity and low power consumption. Theoretically, very small detection limits of air velocity of some micrometers per second are achievable. However, the superimposed free convection is the main obstacle which prevents reaching… (More)

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