Sachin Sonkusale

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We have demonstrated a new planar edge defined alternate layer (PEDAL) process to make sub-25 nm nanowires across the whole wafer. The PEDAL process is useful in the fabrication of metal nanowires directly onto the wafer by shadow metallization and has the ability to fabricate sub-10 nm nanowires with 20 nm pitch. The process can also be used to make(More)
We have demonstrated a new PEDAL process to make sub-25 nm nanowires template across the entire Silicon (110) wafer suitable for wafer-scale nanoimprinting. The “PEDAL lift-off” has the ability to fabricate metal nanowires directly on the wafers without using nanoimprint techniques. The process involves defining the edge by etching a trench, patterned using(More)
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