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  • A.H. Epstein, S.D. Senturia, +20 authors I.A. Waitz
  • Materials Science, Engineering
  • Proceedings of International Solid State Sensors…
  • 1997
  • MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power whileContinue Reading
  • Yoav Peles, V. T. Srikar, T. Harrison, Clark G. Protz, Aleš Mráček, S. Spearing
  • Materials Science
  • Journal of Microelectromechanical Systems
  • 2004 (First Publication: 1 February 2004)
  • The fluidic packaging of Power MEMS devices such as the MIT microengine and microrocket requires the fabrication of hermetic seals capable of withstanding temperature in the range 20-600/spl deg/CContinue Reading