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A capacitance-to-digital converter for displacement sensing with 17b resolution and 20μs conversion time
TLDR
In precision mechatronic systems, such as wafer steppers, the position of critical mechanical components must be dynamically stabilized with sub-nanometer precision. Expand
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  • 12
Power-Efficient High-Speed and High-Resolution Capacitive-Sensor Interface for Subnanometer Displacement Measurements
  • S. Xia, S. Nihtianov
  • Engineering, Computer Science
  • IEEE Transactions on Instrumentation and…
  • 10 February 2012
TLDR
This paper presents a power-efficient capacitive-sensor interface solution for high-speed and high-resolution subnanometer displacement measurement systems. Expand
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for Capacitive Sensors
Capacitive sensors are a good choice for sub­ nanometer-resolu tion position measurements, but their performance is dependent on the correct alignment. Therefore, a capacitive sensor with anExpand
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  • 2
Measuring in the Subnanometer Range: Capacitive and Eddy Current Nanodisplacement Sensors
  • S. Nihtianov
  • Materials Science
  • IEEE Industrial Electronics Magazine
  • 19 March 2014
In this article, an overview of capacitive and eddy current sensors (ECSs) for measuring very small displacements in the subnanometer range is presented in view of the latest advancements in theExpand
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A Precision Capacitance-to-Digital Converter With 16.7-bit ENOB and 7.5-ppm/°C Thermal Drift
TLDR
This paper presents a high-precision capacitance-to-digital converter for displacement measurement in advanced industrial applications, based on a charge-balancing third-order delta–sigma modulator. Expand
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High performance silicon-based extreme ultraviolet (EUV) radiation detector for industrial application
Silicon-based p+n junction photodiodes have been successfully fabricated for radiation detection in the extreme ultraviolet (EUV) spectral range. The diode technology relies on the formation of aExpand
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Eddy-Current Sensor Interface for Advanced Industrial Applications
TLDR
In this paper, a novel integrated eddy-current sensor interface is presented. Expand
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  • 1
Comparative Study of Silicon-Based Ultraviolet Photodetectors
This review article presents a comparative study of different silicon-based ultraviolet (UV) photodetector technologies. After a brief introduction and classification of UV photodetectors, a generalExpand
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9.8 An energy-efficient 3.7nV/√Hz bridge-readout IC with a stable bridge offset compensation scheme
TLDR
This paper describes a low-noise energy-efficient ROIC, which achieves a 3.7nV/√Hz input-referred noise PSD and a power efficiency factor (PEF) of 44.1. Expand
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A Novel Interface for Eddy Current Displacement Sensors
TLDR
In this paper, we propose a novel interface concept for eddy current displacement sensors. Expand
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