Claim Your Author Page
Ensure your research is discoverable on Semantic Scholar. Claiming your author page allows you to personalize the information displayed and manage publications.
In this work, we report high performance (I<inf>on</inf> ∼1 mA/µm at Ioff 100nA/µm @ 1V Vcc) short channel p-type SiGe/Si FinFETs combining high mobility, low T<inf>inv</inf> (scaled High-k w/o Si… (More)
We present an approach to scale Rext while maintaining control of short channel effects in scaled finFETs. For FETs with fins <20nm, an enhancement of 19% in drain current was achieved in nFETs by… (More)
An interferometer composed of a dual-frequency laser, sensing assembly, and decoding system is proposed for angular displacement determinations. The laser is a heterodyne light source. The sensing… (More)
White light interferometry has become an important method for measuring micro surface profiles with a long vertical range and nano-scale resolution. However, environmental vibration encountered in… (More)
Urgent needs for high-speed, non-contact and in-situ measurement with high accuracy and repeatability are of great importance in automated optical inspection. Therefore, optical phase-shifting… (More)