S. Shaibani

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—An interface for MEMS gyroscope is implemented in 0.18µm HVCMOS technology, and achieves a low noise floor of 1m°/sec/Hz over 200Hz BW. Electromechanical force-feedback and self-clocking scheme based on gyro resonance are implemented. The interface includes on-chip reference generation, decimation, and temperature compensation.
An interface for MEMS gyroscope is implemented in 0.18µm HVCMOS technology, and achieves a low noise floor of 1m°/sec/√Hz over 200Hz BW. Electromechanical ΣΔ force-feedback and self-clocking scheme based on gyro resonance are implemented. The interface includes on-chip reference generation, decimation, and temperature(More)
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