Søren Jensen

1S H Jensen
1D Giacobello
1Mads Graesbøll Christensen
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We present a micro electromechanical tunable capacitor with a low control voltage, a wide tuning range and adequate electrical quality factor. The device is fabricated in a single-crystalline silicon layer using deep reactive ion etching (DRIE) for obtaining high-aspect ratio (> 20) parallel combdrive structures with vertical sidewalls. The process sequence(More)
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