Ruijing Ge

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The mechanical properties of Si<sub>1-x</sub>Ge<sub>x</sub> thin films are studied via nanoindentation. The Si<sub>1-x</sub>Ge<sub>x</sub> thin films are prepared with a biased target ion beam deposition (BTIBD) method. We investigate the effect of varying the Si to Ge composition ratio on the elastic modulus and hardness of the resulting alloyed films. In(More)
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