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This paper presents a simple method to fabricate micro-ball lens and its array. The key technology is to use the hydrophobic characteristics of polyterafluoroethylene (PTFE) substrate. High contact angle between melted photoresist pattern and PTFE can generate micro-ball lens and its array. PTFE thin film was spun onto a silicon wafer and dried in oven.(More)
This paper presents a novel method to fabricate the horizontal frustum structure as a planar optical waveguide by using the proximity printing technique. A horizontal frustum optical waveguide with a both lateral and vertical taper structure was produced. The orthogonal and inclined masks with the diffraction effect were employed in lithography process.(More)
This paper describes the development of metallic bipolar plate fabrication using micro-electroforming process for mini-DMFC (direct methanol fuel cell) stacks. Ultraviolet (UV) lithography was used to define micro-fluidic channels using a photomask and exposure process. Micro-fluidic channels mold with 300 μm thick and 500 μm wide were firstly fabricated in(More)
In this paper, a practical micromachining technology was applied for the fabrication of a micro probe using a complex nontraditional machining process. A series process was combined to machine tungsten carbide rods from original dimension. The original dimension of tungsten carbide rods was 3mm; the rods were ground to a fixed-dimension of 50µm using(More)
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