Rosa Lahiji

Learn More
—parylene-N is used as a dielectric layer to create ultra low-loss 3-D vertical interconnects and coplanar waveguide (CPW) transmission lines on a CMOS substrate. Insertion loss of 0.013 dB for a 3-D vertical interconnect through a 15-m-thick parylene-N layer and 0.56 dB/mm for a 50-CPW line on the parylene-N layer (compared to 1.85 dB/mm on a standard CMOS(More)
  • 1