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Many processes exist in which a thin film is deposited from the gas phase, e.g. Chemical Vapor Deposition (CVD). These processes are operated at ever decreasing reactor operating pressures and with… (More)
The application of a three dimensional, self-aligning shadow mask in (110)-oriented silicon for thin-film metal deposition is discussed. This shadow mask is used for the deposition of metal tracks on… (More)
A new approach for performing numerical direct simulation Monte Carlo (DSMC) simulations on turbomolecular pumps in the free molecular and transitional flow regimes is described. The chosen approach… (More)
Specially designed experiments were performed for the validation of direct simulation Monte Carlo calculations of rarefied internal gas flows. Hot zinc vapor was released into a cold-wall deposition… (More)
The article discusses the challenges posed while trying to locate and navigate libraries in Canada and France. Visits to some of the main libraries are highlighted.
The Kenics static mixer is investigated both experimentally and numerically in the range of Reynolds 10 - 1000. A setup with a two-element static mixer, which differs slightly from the original… (More)