Ronald Logan

We don’t have enough information about this author to calculate their statistics. If you think this is an error let us know.
Learn More
In this paper we present an early detection mechanism for semiconductor circuit yield prediction and tracking. Several discrete devices used as components of functional circuits have been examined by their first-metal level test data and correlated to the higher metal level functional yield. A concept of Device Health Composite Yield is also introduced in(More)
It is known that significant intra-die thermal absorption variation is caused by non-optimized rapid thermal anneal (RTA) conditions and the variation depends on the local pattern density of various types of exposed stacks of the wafer. This variation can create errors in the electrical measurement MOSFET gate length itself. Two electrical methods for(More)
  • 1