Rock A Powell

  • Citations Per Year
Learn More
An optical system based on the confocal principle has been developed for real-time precision measurements of the depth of micro-holes during the laser drilling process. The capability of the measuring system is theoretically predicted by the Gaussian lens formula and experimentally validated to achieve a sensitivity of 0.5 μm. A nanosecond laser system was(More)
A radiation source has been developed and implemented from Cerenkov emission that is intended to provide an intense continuum from the infrared to 600 A. Parasitic use of the primary electron beam at the Stanford Linear Accelerator Center (SLAC) together with a novel optical geometry for light collection can give a focused and tunable ultraviolet beam with(More)
Physical vapor deposition (PVD) using ionized metal plasmas (ionized PVD or IPVD) is widely used to deposit conducting diffusion barriers and liners such as Ta and TaN for use in ultra-large-scale integrated (ULSI) interconnect stacks. Ionized PVD films exhibit the low resistivity, high density, and good adhesion to underlying dielectric desired for this(More)
  • 1