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We present a structural analysis of the multi-layer graphene-4HSiC(000 ¯ 1) system using Surface X-Ray Reflectivity. We show for the first time that graphene films grown on the C-terminated (000 ¯ 1) surface have a graphene-substrate bond length that is very short (1.62Å). The measured distance rules out a weak Van der Waals interaction to the substrate and(More)
This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by masked-maskless combined anisotropic etching. Four resonant beams are located at the surface of a silicon substrate, whereas the gravity centre of(More)
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