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SUMMARY Low-temperature bonding methods of optoelectronic chips, such as laser diodes (LD) and photodiode (PD) chips, have been the focus of much interest to develop highly functional and compact opto-electronic devices, such as microsensors and communication modules. In this paper, room-temperature bonding of the optoelectronic chips with Au thin film to(More)
The authors propose a new sensor structure for an integrated laser Doppler blood flowmeter that consists of two silicon cavities with a PD and laser diode inside each cavity. A silicon lid formed with a converging microlens completes the package. This structure, which was achieved using micromachining techniques, features reduced optical power loss in the(More)
Here, we report the development of an integrated laser Doppler blood flow micrometer for chickens. This sensor weighs only 18 g and is one of the smallest-sized blood flow meters, with no wired line, these are features necessary for attaching the sensor to the chicken. The structure of the sensor chip consists of two silicon cavities with a photo diode and(More)
Alcohol has a variety of effects on the human body, affecting both the sympathetic and parasympathetic nervous system. We examined the peripheral blood flow of alcohol drinkers using a micro-integrated laser Doppler blood flow meter (micro-electromechanical system blood flow sensor). An increased heart rate and blood flow was recorded at the earlobe after(More)
BACKGROUND Because the conventional evaluation of autonomic nervous system (ANS) function inevitably uses long-lasting uncomfortable electrocardiogram (ECG) recording, a more simplified and comfortable analysis system has been sought for this purpose. The feasibility of using a portable micro-electromechanical system (MEMS) blood flowmeter to analyze heart(More)
Using microelectromechanical systems technology, the authors have developed the world’s smallest, lightest and lowest electric power-consuming laser Doppler blood flow sensor that can measure blood flow while the subject is moving. The influence of alcohol consumption on blood flow was investigated when measuring at a subject’s earlobe. An(More)
This paper describes a Fourier transform (FT) near-infrared spectrometer that uses an integrated prism scanning interferometer whose optical paths are stabilized by corner cubes. A combination of corner cubes and a retroreflection mirror, which is sometimes used in the conventional interferometer for FT spectrometers, is adopted and adapted to the(More)
We propose a promising biaxial shearing force measurement device with an integrated micro displacement sensor (chip size of 3 mm by 3 mm and 0.7 mm in thickness) housed in an external trapezoidal metallic frame. The displacement sensor is used to measure the tilt angles of a mirror on the ceiling of the frame caused by the shearing force applied to the(More)
SUMMARY This paper focuses on optical integration technology and its application in optical microsensors used in biomedical fields. The integration is based on the hybrid integration approach, achieving high performance , small size and weight, and lower cost. First, we describe the key technologies used in hybrid integration, namely passive alignment(More)