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— This paper addresses the latest developments in biomimetic hair-flow sensors towards sensitive high-density arrays. Improving the electrodes design of the hair sensor, using Silicon-on-Insulator (SOI) wafer technology, has resulted in the ability to measure small capacitance changes as caused by minute rotations of single-hair sensors. The detection(More)
In this paper, a bulk micromachined silicon load cell is presented, designed for loads up to 1000 kg. ANSYS simulations were used to determine the load cell dimensions and strain gauge positions. The load cell consists of two parts, which are bonded to each other using Low Temperature Silicon Direct Bonding processes (LTSDB). To isolate the membrane with(More)
For the first time, a complete 3-dimensional sound intensity sensor – consisting of 4 particle velocity sensors and a pressure microphone – has been integrated on a single chip, providing the possibility to do nearly point measurements of acoustic particle velocity, sound pressure, and therefore sound intensity. Principally the sensor consists of two(More)
Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate(More)
We report current developments in biomimetic flow-sensors based on flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. In this work we describe(More)
This paper presents the results of 2D-finite-element simulations of the periodic change in capacitance between two periodic structures, one sliding and one fixed (i.e. sense-structure). These structures are potentially interesting for long-range and high-accuracy position detection of microactuators. The use of periodic geometries and the combination of a(More)
This paper presents the fabrication of flow-sensors based on the drag-force induced motion of artificial hairs connected to capacitive read-out. Artificial hairs were made either out of moulded silicon-nitride structures or by SU-8. The SU-8 hairs were suspended on membranes containing electrodes to form the variable capacitors. Silicon-rich-nitride hairs(More)
Biologically inspired sensor-designs are investigated as a possible path to surpass the performance of more traditionally engineered designs. Inspired by crickets, artificial hair sensors have shown the ability to detect minute flow signals. This paper addresses developments in the design, fabrication, interfacing and characterization of biomimetic hair(More)