Remco J. Wiegerink

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We have realized a micromachined micro Coriolis mass flow sensor consisting of a silicon nitride resonant tube of 40 µm diameter and 1.2 µm wall thickness. Actuation of the sensor in resonance mode is achieved by Lorentz forces. First measurements with both gas and liquid flow have demonstrated a resolution in the order of 10 milligram per hour. The sensor(More)
  • A M K Dagamseh, C M Bruinink, H Droogendijk, R J Wiegerink, T S J Lammerink, G J M Krijnen
  • 2010
— This paper addresses the latest developments in biomimetic hair-flow sensors towards sensitive high-density arrays. Improving the electrodes design of the hair sensor, using Silicon-on-Insulator (SOI) wafer technology, has resulted in the ability to measure small capacitance changes as caused by minute rotations of single-hair sensors. The detection(More)
For the first time, a complete 3-dimensional sound intensity sensor – consisting of 4 particle velocity sensors and a pressure microphone – has been integrated on a single chip, providing the possibility to do nearly point measurements of acoustic particle velocity, sound pressure, and therefore sound intensity. Principally the sensor consists of two(More)
Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate(More)
  • C M Bruinink, R K Jaganatharaja, M J De Boer, E Berenschot, M L Kolster, T S J Lammerink +2 others
  • 2009
This paper reports on recent developments to increase the performance of biomimetic flow-sensor arrays by means of several technological advancements in the fabrication procedures and corresponding sensor design optimizations. Advancements include fabrication procedures with higher process latitude and geometrical modifications of several parts of the flow(More)
A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nl⋅min-1 up to 300 nl⋅min-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the(More)
We report current developments in biomimetic flow-sensors based on flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. In this work we describe(More)
The packaging effects of an acoustic particle velocity sensor have been analysed both analytically and by means of finite volume simulations on fluid dynamics. The results are compared with acoustic experiments that show a large magnification of the output signal of the sensor due to the mounting inside a cylindrically shaped package. The influences of the(More)
This paper presents the fabrication of flow-sensors based on the drag-force induced motion of artificial hairs connected to capacitive read-out. Artificial hairs were made either out of moulded silicon-nitride structures or by SU-8. The SU-8 hairs were suspended on membranes containing electrodes to form the variable capacitors. Silicon-rich-nitride hairs(More)