Radivoje S. Popovic

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An optical imager is reported based on single photon avalanche diodes. The imager, fabricated in 0.8 m CMOS technology, consists of an array of 1024 pixels each with an area of 58 m× 58 m for a total chip area of 2.5 mm× 2.8 mm. The architecture of the imager is reduced to a minimum since no A/D converter is required. Moreover, since the output of each(More)
In this paper we report on a 32x32 optical imager based on single photon avalanche diodes integrated in CMOS technology. The maximum measured dynamic range is 120dB and the minimum noise equivalent intensity is 1.3x10lx. The minimum integration time per pixel is 4μs. The output of each pixel is digital, thereby requiring no complex read-out circuitry, no(More)
We present the first filly CMOS-integrated 3D Hall probe. The microsystem is developed for precise magnetic field measurements in the range from militeslas up to tens of tesla in the frequency range from DC to 30 kHz and a spatial resolution of about 150 pm. Microsystem is realized in a conventional CMOS process without any additional processing step and(More)
We present parallel single molecule detection (SMD) and fluorescence correlation spectroscopy (FCS) experiments with a fully integrated complementary metal oxide semiconductor (CMOS) single-photon 2x2 detector array. Multifocal excitation is achieved with a diffractive optical element (DOE). Special emphasis is placed on parallelization of the total system.(More)
NMR-microprobes based on solenoids and Helmholtz coils have been microfabricated and NMR-spectra of mammalian cells have successfully been taken. The microfabrication technology developed for these probes consists of three electroplated copper levels for low resistance coils and three SU-8 layers for the integration of microchannels. This technology allows(More)
We present a novel, fully integrated magnetic field sensor made in the standard, polysilicon-gate CMOS technology. The circuit shows a sensitivity of 1.2 V/T with 10 V supply voltage and 100 PA current consumption. The circuit consists of a pair of split-drain MOS transistors in a CMOS-differential amplifier-like configuration.
An innovative release method of polymer cantilevers with embedded integrated metal electrodes is presented. The fabrication is based on the lithographic patterning of the electrode layout on a wafer surface, covered by two layers of SU-8 polymer: a 10m-thick photo-structured layer for the cantilever, and a 200m-thick layer for the chip body. The releasing(More)
The first commercially available teslameter with a fully integrated three-axis Hall probe is described. The Hall probe chip contains horizontal and vertical Hall elements, analog electronics, and a synchronization circuit. A horizontal Hall element measures the perpendicular component, and two vertical Hall devices measure the two in-plane components of a(More)
The new digital teslameter system incorporates a 3-axis Hall probe, analog electronics based on the spinning-current technique, 24-bit analog-to-digital converter, computer, and 7-digit touch-screen display. The Hall probe is a single silicon chip with monolithically integrated horizontal and vertical Hall magnetic sensors and a temperature sensor. The Hall(More)
NMR spectra of mammalian cells are taken using surface microprobes that are based on microfabricated planar coils. The surface microprobe resembles a miniaturized Petri dish commonly used in biological research. The diameter of the planar coils is 1 mm. Chinese Hamster Ovaries are immobilized in a uniform layer on the microprobe surface or patterned by an(More)
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