R. Silver

Publications223
h-index22
Citations1,769
Highly Influential Citations25
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Development of ballistics identification?from image comparison to topography measurement in surface metrology
TLDR
A Two-dimensional and Three-dimensional Topography Measurement and Correlation System was developed at the National Institute of Standards and Technology for certification of Standard Reference Material 2460/2461 bullets and cartridge cases. Expand
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Selecting Valid Correlation Areas for Automated Bullet Identification System Based on Striation Detection
TLDR
In this paper, an edge detection algorithm and selection process are used together to locate the edge points of all tool-mark features and filter out those not corresponding to striation marks. Expand
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The National Ballistics Imaging Comparison (NBIC) project.
In response to the guidelines issued by the American Society of Crime Laboratory Directors/Laboratory Accreditation Board (ASCLD/LAB-International) to establish traceability and quality assurance in… Expand
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Metrology, Inspection, and Process Control for Microlithography XVIII
  • R. Silver
  • Materials Science, Engineering
  • 1 May 2005
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Electron probe microanalysis of silicon and the role of the macrophage in proximal (capsule) and distant sites in augmentation mammaplasty patients.
Electron probe x-ray microanalysis was used to locate silicon (Si) within macrophages from 12 women who had previously undergone polymer prosthesis augmentation or reconstruction. Silicon was… Expand
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Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis.
We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope, by analyzing through-focus… Expand
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Developing an uncertainty analysis for optical scatterometry
This article describes how an uncertainty analysis may be performed on a scatterometry measurement. A method is outlined for propagating uncertainties through a least-squares regression. The method… Expand
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Improving optical measurement uncertainty with combined multitool metrology using a Bayesian approach.
TLDR
In this paper, a Bayesian statistical approach is proposed to allow the combination of different measurement techniques that are based on different physical measurements to reduce the uncertainties of the parameter estimators. Expand
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Linewidth measurement technique using through-focus optical images.
We present a detailed experimental study of a new through-focus technique to measure critical dimension linewidth with nanometer sensitivity using a bright field optical microscope. This method… Expand
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Köhler illumination for high-resolution optical metrology
Accurate preparation of illumination is critical for high-resolution optical metrology applications such as linewidth and overlay measurements. To improve the detailed evaluation and alignment of the… Expand
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