R. Mueller-Fiedler

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In this paper single-pole single-throw K-band microelectro-mechanical capacitive switches are discussed, exhibiting low insertion losses (<0.3 dB@21 GHz) and good isolation (34 dB@21 GHz). Depending on the respective geometry, an electromechanical characterization yields actuation voltages from 16 to 33 V and switching times around 10 /spl mu/s.(More)
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