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We have studied the lattice sites of Er in CZ Si single crystals by using conversion electron emission channeling from the isotope Er (2.28 s) which is the decay product of radioactive Tm (9.25 d). Following 60 keV implantation of Tm at a dose of 4×10 cm and annealing at 600°C, more than 90% of Er is found close to tetrahedral insterstitial (T) sites. The(More)
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