R. Linderman

Learn More
We present a nano-electromechanical system based on an individual single-walled carbon nanotube (SWNT) demonstrating their potential use for future displacement sensing at the nanoscale. The fabrication and characterization of the proposed nanoscaled transducer, consisting of a suspended metal cantilever mounted on top of the center of a suspended SWNT, is(More)
This work presents the first micro-sized axial flow fan driven by a scratch drive actuator rotary motor. The eight fan blades are mass assembled using the surface tension of molten 4 mil diameter 63 Sn/37 Pb manufactured solder spheres. A sample size of 27 blade angles was measured with a mean assembly angle of 107.24/spl deg/. The actual mean of the(More)
This paper describes a novel fabrication approach using Atomic Layer Deposition (ALD) of dielectric materials to protect and coat released MEMS devices. The nature of ALD film ensures coverage on all sides of a released MEMS device and is done at a relatively low temperature (down to 150/spl deg/C). The ALD film thickness can be precisely controlled as each(More)
This paper reports on the fluidic and mechanical performance of the resonant micro fan as an in-channel gas pump. Experiments with resonant fan arrays assembled within test channels were performed in order to observe the effects of changing fan length and resonant frequency with respect to volumetric flow rate in the channel. Flow rates of approximately 10(More)
We report on the performance of a multi-purpose strain sensor for embedded carbon nanotubes (CNT). The sensor is based on a microactuator operable in various environments including in situ scanning electron microscopy (SEM) and Raman microscopy from the same tube. The fabrication of the MEMS was outsourced to a foundry process first and then post-processed(More)
  • 1