R. Gehrking

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In linear micro-actuators based on the electromagnetic driving principle, attractive vertical forces are generated between stator and traveler in addition to the drive forces. These vertical forces reduce the resulting driving force of the motor depending on the quality of the applied guide system. Thus, the development of an adequate guide system with a(More)
This paper reports on possibilities of simulating electromagnetic micro linear motors to achieve the maximum magnetic and physical performance. Using a finite element method, the force of the motor is calculated and using these characteristic curves, the physical behaviour is simulated. At the end, a comparison with measurements is presented
This paper reports on the differences designing linear motors using micro fabrication techniques like sputtering with respect to normal techniques like inserting fabricated coils into a magnetic yoke. Special rules resulting from the different materials and fabrication processes is discussed and analyzed using a finite element method. As a result of the(More)
This paper reports on a micro linear stepping motor which is supplied by a DC-DC converter. The micro linear motor is built up by using micro fabrication techniques like sputtering, UV depth lithography and electroplating [1, 2, 3]. In order to adjust the stator current, an adapted drive has been developed. Due to the very small inductances of the motor(More)
This paper reports on a micro linear stepping motor with an integrated magnetic guidance which is built up using micro fabrication techniques like sputtering, UV depth lithography and electroplating. The results of FEM simulations in order to design the motor and the necessary changes in the layout for the purpose of levitating the traveller without(More)
This paper reports on a micro linear motor with integrated passive magnetic guidance and the differences when designing such linear motors using micro fabrication techniques like sputtering with respect to normal techniques like inserting fabricated coils into a magnetic yoke. The passive magnetic guidance could be integrated without the need of further(More)
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