R. A. Dorey

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Micro electromechanical systems (MEMS) are finding uses in an increasing number of diverse applications. Currently the fabrication techniques used to produce such MEMS devices are primarily based on 2-D processing of thin films. The challenges faced by producing more complex structures (e.g. high aspect ratio, spans, and multi-material structures) require(More)
Micromachining techniques, in combination with low temperature ceramic composite sol gel processing, have been used to fabricate annular array thickness-mode piezoelectric micro ultrasonic transducers (Tm-pMUT). The processing techniques of low temperature (720degC) composite sol gel ceramic (sol + ceramic powder) deposition and wet etching will be(More)
Direct Writing of Lead Zirconate Titanate Piezoelectric Structures by Electrohydrodynamic Atomisation S.A. Rocks, D. Wang, D. Sun, S.N. Jayasinghe, M.J. Edirisinghe, R.A. Dorey. Nanotechnology Centre, Cranfield University, Bedfordshire, UK, Materials Department, Queen Mary, University of London, London, UK, and Mechanical Engineering Department, University(More)
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