Rüdiger Rosenkranz

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• By decreasing the accelerating voltage, the severe shrinkage in the OSG thin films can be dramatically reduced, and it can be even avoided by working with Ep 1 BLOCKINkV. • Working with a shorter value of working distance (WD 2 mm) is an essential requirement to image with low E p , in order to improve the resolution. • The energy selective(More)
Managing the emerging internal mechanical stress in chips, particularly if they are 3D stacked, is a key task to maintain performance and reliability of microelectronic products. Hence, a strong need of a physics based simulation methodology emerges. This physics-based simulation, however, requires material parameters with high accuracy. A full-chip(More)
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