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—This paper proposes an improved sliding mode control with perturbation estimation (SMCPE) featuring a PID-type sliding surface and adaptive gains for the motion tracking control of a micromanipulator system with piezoelectric actuation. One advantage of the proposed controller lies in that its implementation only requires the online estimation of(More)
A new three degrees of freedom (3-DOF) translational parallel manipulator (TPM) with fixed actuators called a 3-PRC TPM is proposed in this paper. The mobility of the manipulator is analyzed via screw theory. The inverse kinematics, forward kinematics, and velocity analysis are performed and the singular and isotropic configurations are identified(More)
Flexure-based micropositioning systems with a large workspace are attractive for a variety of precision engineering applications. In this paper, a new idea of multistage compound parallelogram flexure is proposed for the mechanism design of a novel parallel-kinematic XY micropositioning system, which has a motion range larger than 10 mm along with a compact(More)
In this paper, a global sliding mode control (GSMC) scheme is implemented on a piezo-driven XY parallel micropositioning stage to compensate for the unmodeled hysteresis aiming at a sub-micron accuracy motion tracking control. The GSMC controller is designed with the consideration of all uncertainty bounds. In the controller implementation, a high-gain(More)
In this paper, an adaptive neural sliding mode control based on radial basis function (RBF) neural network (NN) is implemented on a piezo-driven XY parallel micro-positioning stage for a sub-micron accuracy motion tracking control. The controller is designed to map the relationship between the sliding surface variable and voltage applied to piezoelectric(More)
A micro-/nanopositioning system with both large motion range and compact size is highly desired in various precision engineering applications. In this paper, the design of a new compliant micropositioning stage with translational motion is proposed based on flexure mechanisms. The stage parameters are optimized by using the genetic algorithm (GA) to achieve(More)
In this paper, a concept of totally decoupling is proposed for the design of a flexure parallel micromanipulator with both input and output decoupling. Based on flexure hinges, the design procedure for an XY totally decoupled parallel stage (TDPS) is presented, which is featured with decoupled actuation and decoupled output motion as well. By employing(More)
A new 2-degrees of freedom compliant parallel micromanipulator (CPM) utilizing flexure joints is proposed for two-dimensional nanomanipulation in this paper. By a proper selection of actuators, flexure hinges, and materials, this system is constructed and analyzed by a pseudorigid-body model, architectural optimization, and finite-element analysis. Both the(More)
This paper reports the design and development processes of a totally decoupled flexure-based XYZ parallel-kinematics micropositioning stage with piezoelectric actuation. The uniqueness of the proposed XYZ stage lies in that it possesses both input and output decoupling properties with integrated displacement amplifiers. The input decoupling is realized by(More)