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  • Bo-Wei Chen, Ting-Chang Chang, +15 authors Tsu-Chiang Chang
  • Materials Science, Medicine
  • ACS applied materials & interfaces
  • 5 April 2017
  • The surface morphology in polycrystalline silicon (poly-Si) film is an issue regardless of whether conventional excimer laser annealing (ELA) or the newer metal-induced lateral crystallization (MILC)Continue Reading