Optofluidic platforms used for biomolecular detection require spectral filtering for distinguishing analyte signals from unwanted background. Towards a fully integrated platform, an on-chip filter is required. Selective deposition of dielectric thin films on an optofluidic sensor based on antiresonant reflecting optical waveguide (ARROW) technology provides… (More)
A new type of hollow core waveguide fabricated with Ta<inf>2</inf>O<inf>5</inf> and SiO<inf>2</inf> films is demonstrated. The photoluminescence background of ARROW waveguides is decreased significantly by replacing Si<inf>3</inf>N<inf>4</inf> with Ta<inf>2</inf>O<inf>5</inf> films, while maintaining low optical losses.
We present the integration of two ultra-sensitive technologies - ARROW waveguides and solid-state nanopore - in a planar electro-optofluidic platform. The functionality of the chip is demonstrated using concurrent electrical and optical detection of fluorescent nanospheres.