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The SEMATECH " Test Methods Evaluation " study, Project Number S-121, is an experiment to determine the relative merits of several test methodologies often used by SEMAT-ECH member companies and other IC manufacturers. Conclusions drawn from the experiment thus far have indicated that each test methodology uniquely detects defects. This-experimentation and(More)
SEMATECH has sponsored a " Test Method Evaluation " study to understand the trade-offs among the most common test methodologies used in the industry[1,2]. This paper presents the results of the failure analysis portion of that project. The testing, reliability stressing, characterization, fault diagnosis and physical analysis results are presented for 25(More)