The demand for automatic quality inspection of individual micro components increases strongly in micro optoelectronics industry. In many cases, quality inspection of those micro components needs dexterous microhandling. However, automatic dexterous handling of micro components is a very challenging issue which is barely explored. This paper presents a… (More)
This paper reviews the activities in the field of microrobotics of two closely cooperating microsystem groups in Finland. Topics covered include mechanical and biological micromanipulators, microactuator modeling, modeling of handling tasks and prototyping gastrointestinal biotelemetering device.