Paul Unruh

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− Accurate measurements of MEMS surfaces, geometries and motions are crucial to achieving the desired performance of the devices. The wide variety of MEMS devices in development and production requires very flexible metrology for single-platform characterization. In addition to having greatly varying geometries, devices must also be characterized statically(More)
  • P Unruh
  • DTW. Deutsche tierärztliche Wochenschrift
  • 2003
The latest amendment of Art. 20a GG dates from August 1st 2002. With this amendment the moral thought of animal protection has become a constitutional principle. The following text tries to explain the consequences of this amendment for the legislation, the administration and the jurisdiction in Germany. It ist to be expected that the new Art. 20 a GG will(More)
While computer modeling of MEMS systems is becoming increasingly sophisticated, the delicacy and complexity of many MEMS components requires accurate metrology of the final devices to assure proper performance. Stiction, motion versus drive signal, shape changes during actuation, angular repeatability, and resonant frequencies are all items of interest. By(More)
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