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The progress in lead zirconate titanate Pb(Zr<sub>x</sub>,Ti<sub>1-x</sub>)O<sub>3</sub> (PZT) thin film deposition and integration technology has led to an exponential growth of piezoelectric micro-electromechanical systems (piezo-MEMS), particularly for pure actuator devices such as inkjet print-heads and autofocus lenses. These devices rely on the(More)
h i g h l i g h t s g r a p h i c a l a b s t r a c t The assembly and operation of a micro-power plant is successfully demonstrated. The micro-power plant consists of micro-SOFCs, a micro-reactor and a gas carrier. Above 470 C the system run thermally independent. The internal reformation of butane reached a H 2 yield of 60 at.%. An OCV of 1.0 V and a(More)
Low temperature micro-solid oxide fuel cell (micro-SOFC) systems are an attractive alternative power source for small-size portable electronic devices due to their high energy efficiency and density. Here, we report on a thermally self-sustainable reformer – micro-SOFC assembly. The device consists of a micro-reformer bonded to a silicon chip containing 30(More)
Niobium (Nb) doping is known to have a beneficial effect on many properties of lead zirconate titanate (PZT) ceramics. Substituting titanium (Ti) or zirconium (Zr) on a B-site, Nb ions form positive point defects that repel oxygen vacancies, even though they are compensated by negative lead (Pb) vacancies of half their concentration. As a consequence, PZT(More)
A set up originally designed for e<sub>31f</sub> measurements of piezoelectric thin films was operated in a way to assess life time issues with simultaneous recording of polarization change, PV-loop integral, and piezoelectric beam deflection. A 1&#x03BC;m thick PZT 53/47 thin film was subjected to 10<sup>9</sup> unipolar pulses with 150 kV/cm driving(More)
Accurate and reliable measurements of piezoelectric coefficients on thin films are required to perform thin film process development and compare different manufacturing techniques and quality especially in MEMS applications. State of the art measurements are performed by double-beam laser interferometry since many years, however the variety of parameter(More)
We report on microstructure evolution and enhancement of longitudinal and transverse piezoelectric responses of AlN thin film with partial substitution of Al<sup>3+</sup> ions by Sc<sup>3+</sup> ions. Piezoelectric AlScN alloys are very promising for energy harvesting and sensor applications. AlScN 83/87 alloys exhibit a figure of merit that allows for a(More)
We studied the influence of a work function difference between the electrodes of ferroelectric capacitors on the voltage offset of ferroelectric loops using the parallel plate and interdigitated electrodes configurations. We found there is no influence. However, imprinting caused by leaving the sample in a poled state lead to a voltage offset of the(More)