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This paper reviews recent experiments that have shown that the probable mechanism for low voltage trap generation and dielectric breakdown is anode hydrogen release. Vibrational excitation of silicon-hydrogen bonds is the process that provides the most plausible explanation for the existence of a power law model for TDDB.
ACKNOWLEDGEMENTS In my professional journey, I have been fortunate in having the opportunity to spend the past 22 years in the employ of Texas Instruments Incorporated. In this environment, I have worked with, learned from, and been nurtured by many extraordinarily talented individuals. I have also benefited from interactions with researchers from other… (More)