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  • Jung-Min Jerry Park, Min-woo Song, +7 authors Ho-Kyu Kang
  • Physics
  • IEEE International Electron Devices Meeting
  • 2007 (First Publication: 1 December 2007)
  • We have successfully integrated a mass production worthy MIM capacitor on gate polysilicon (MIM-COG) structure using HfO<sub>2</sub>/HfO<sub>x</sub>C<sub>y</sub>N<sub>z</sub>/HfO<sub>2</sub>(HNH)Continue Reading