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- N. P. Pham, P. M. Sarro, K. T. Ng, J. N. Burghartz
- Technical Digest. MEMS 2001. 14th IEEE…
- 2001
In this paper a novel micromachining post-process module applied to the backside of processed wafers for the integration of radio frequency (RF) devices in silicon is presented. A specific… (More)
- G. Vdovin, P. M. Sarro
- Applied optics
- 1995
An electrostatically controlled flexible mirror has been fabricated on a silicon chip by means of bulk micromachining. The mirror has a 10.5 mm × 10.5 mm square aperture and consists of a… (More)
- Trinh Chu Duc, Gih-Keong Lau, J. Fredrik Creemer, P. M. Sarro
- Journal of Microelectromechanical Systems
- 2008
The novel design of a sensing microgripper based on silicon-polymer electrothermal actuators and piezoresistive force-sensing cantilever beams is presented. The actuator consists of a silicon comb… (More)
- J. Fredrik Creemer, Stig Helveg, P J Kooyman, A. M. Molenbroek, H. W. Zandbergen, P. M. Sarro
- Journal of Microelectromechanical Systems
- 2010
We present a microelectromechanical systems (MEMS) nanoreactor that enables high-resolution transmission electron microscopy (TEM) (HRTEM) of nanostructured materials with atomic-scale resolution… (More)
- J. Fredrik Creemer, F. Santagata, +5 authors P. M. Sarro
- 2011 IEEE 24th International Conference on Micro…
- 2011
We present a new MEMS nanoreactor fully integrated on a single die. It enables atomic-scale imaging of nanostructured materials under the high pressures and temperatures that are typical for many… (More)
- Irmantas Kasalynas, A. J. L. Adam, +4 authors P. M. Sarro
- IEEE Journal of Selected Topics in Quantum…
- 2008
A simple mass producible detection array for terahertz radiation has been designed and fabricated. The 1 mm times 1 mm pixels consist of a 0.5 mm times 0.5 mm thin-film absorber on a membrane,… (More)
- J. Fredrik Creemer, Stig Helveg, +4 authors H. W. Zandbergen
- Ultramicroscopy
- 2008
We demonstrate a novel nanoreactor for performing atomic-resolution environmental transmission electron microscopy (ETEM) of nanostructured materials during exposure to gases at ambient pressures and… (More)
- Gianfranco Cocorullo, M. Iodice, Ivo Rendina, P. M. Sarro
- IEEE Photonics Technology Letters
- 1995
A silicon Fabry-Perot waveguide modulator, operating at the fiber optic communication wavelengths of 1.3 and 1.55 /spl mu/m, has been entirely fabricated using microelectronic techniques. The planar… (More)
- Trinh Chu Duc, Gih-Keong Lau, P. M. Sarro
- Journal of Microelectromechanical Systems
- 2008
This paper presents the fabrication, characterization, and application of a novel silicon-polymer laterally stacked electrothermal microactuator. The actuator consists of a deep silicon skeleton… (More)
- F. Santagata, J. J. M. Zaal, V. G. Huerta, Luca Mele, J. Fredrik Creemer, P. M. Sarro
- Journal of Microelectromechanical Systems
- 2012
In this paper, a thin-film packaging approach is developed. It is meant to provide microelectromechanical systems (MEMS) devices with hermetic encapsulation that is sufficiently strong for transfer… (More)