P. Maniraman

We don’t have enough information about this author to calculate their statistics. If you think this is an error let us know.
Learn More
This paper reports on comparison, selection, design and simulation of various types of MEMS based capacitive type pressure sensor for altitude measurement. The widely used capacitive type pressure sensor is analyzed by simulating its diaphragm deflection, capacitance change etc. for a pressure range of 0-1.1 MPa (Mega Pascal) and its merits and demerits are(More)
  • 1