This paper presents both the design and the characterization of a full CMOS magnetic field sensor. As an alternative to Hall effect sensors, it acts as a microscopic cantilever, deformed under the action of the Lorentz force.
Silicon etching at low temperature offers the possibility of manufacturing monolithic sensors with associated electronics. For a given technology, the so-called FSBM, we have established a set of relations to describe the mechanical behavior of an elementary device, the cantilever beam. We have then used these relationships for the performance evaluation… (More)